Thin-Film Equipment Products
Intevac’s Thin-film Equipment product portfolio addressing each of these
markets is based around common core technologies and competencies. Intevac believes
its Thin-film Equipment product portfolio can be extended to support adjacent
markets. Based on its history and market and technology leadership in the hard
disk drive industry, Intevac offers superior high-productivity vacuum handling
of small substrates at the lowest cost of ownership. Lowest cost of ownership
includes various advantages such as high target utilization, high throughput,
small footprint, double-sided coating, and reduced materials costs.
Product Table
The following table presents a representative list of the Thin-film Equipment
products that we offered.
Thin Film Equipment Products
Applications and Features
Hard Disk Drive Equipment Market
200 Lean ® Disk Sputtering System
Uses PVD and chemical vapor deposition (“CVD”) technologies.
Deposits magnetic films, non-magnetic films and protective carbon-based
overcoats.
Provides high-throughput for small-substrate processing.
Over 150 units installed.
200 Lean Etch and Deposition System
Uses PVD and etch technologies.
For use in HAMR and patterned media development.
AccuLuber™ Disk Lubrication System
Deposits lubricants onto the hard disk’s surface to improve durability
and reduce surface friction.
Lubricates disks while under vacuum.
Eliminates the environmentally-hazardous use of solvents.
Upgrades, spares, consumables and services (non-
systems business)
Upgrades to the installed base to support the continued growth in areal
density or reduce the manufacturing cost per disk.
Solar PV Market
INTEVAC MATRIX™ PVD System
Deposits electrical contacts and conductor layers, reflective layers,
and transparent conductive oxide layers, all of which are critical to the efficiency
of solar cells.
Includes patented Linear Scanning Magnetic Array (“LSMA”)
magnetron source, with industry-leading target utilization rate of over 65 percent.
Provides high-throughput for small-substrate processing.
INTEVAC MATRIX Implant System
Utilizes the chambers and transport mechanism of the MATRIX platform
while using the implant sources from the ENERGi system.
Received an order for the first pilot system as part of a joint development
program with a customer.
ENERGi™ Implant System
Supports both phosphorus and boron dopant technologies.
Extendable to new advanced solar cell structures.
DCP Market
INTEVAC VERTEX™ System
Utilizes vertical sputtering for multiple film types.
Provides high-throughput for small-substrate processing.
Uses leading target utilization technology.
Modular design enables expandability.
Enables low-temperature processing.
Adjacent Markets
INTEVAC MATRIX System
Incorporates multiple thin-film deposition techniques such as PVD and
CVD.
Consists of high-speed linear transport.
Flexible design enables handling of various different small substrate
sizes and shapes.
Performs double-sided coating within vacuum.
Photonics Segment
Photonics Market
Intevac Photonics develops, manufactures and sells compact, cost-effective,
high-sensitivity digital-optical products for the capture and display of extreme
low-light images. These products incorporate high resolution digital night image
sensors operating in the visible and near infrared (“NIR”) light
spectrums and are based on Intevac’s proprietary EBAPS® (Electron
Bombarded Active Pixel Sensor) technology.
Photonics products primarily address the high performance military night-vision
market. Our products provide digital imagery in extremely low-light level conditions.
Intevac provides these products for military aircraft including the U.S. Army
AH-64 Apache Attack Helicopter and the F-35 Joint Strike Fighter. Additionally,
the Company is developing applications to address ground vehicles, and soldier
head-mounted and weapon-mounted applications.
Military Products
Intevac’s EBAPS sensors are incorporated into custom-designed cameras,
modules and goggle products for high performance military applications. Intevac’s
EBAPS sensors can be integrated at various levels with optics, electronics,
software, and displays based upon customer specifications and requirements.
Customization typically occurs in the areas of electronics, near-eye micro-displays,
and mechanical packaging. Intevac’s products by application are:
Rifle Sight
Intevac provides EBAPS modules that are integrated by our customers into a weapon
sight attached to weaponry including rifles for night time aiming and targeting.
Additionally, Intevac offers micro display optical eyepieces that are mounted
on thermal rifle scopes used by the military.
Helicopter Pilotage
Intevac provides a night-vision camera with a 2.0 mega-pixel resolution EBAPS
module which is gimbal-mounted on the Apache helicopter. The low-light level
digital video is then viewable by the helicopter pilot on a head mounted display
enabling the pilot to have enhanced night vision and allowing the aircrew to
view multiple aircraft-mounted sensor information. In addition the U.S. Navy
has funded a High Resolution Digital Night Vision Goggle development program
incorporating a 4.0 mega-pixel resolution EBAPS module for aviation applications.
Fixed Wing Aircraft Pilotage
Intevac provides night-vision cameras with a 2.0 mega-pixel resolution EBAPS
module which is integrated with the F-35 fighter pilot’s helmet and enables
the pilot to have enhanced night vision incorporating navigational and tactical
information.
Long-Range Target Identification
Intevac provides the Laser Illuminated Viewing and Ranging (“LIVAR®”)
shortwave-infrared camera for long range military night time surveillance systems
that can identify targets at distances of up to twenty kilometers. Photonics’
LIVAR camera is incorporated into long range target identification systems manufactured
by major defense contractors.
Soldier Mobility
Both the U.S. Army and Special Operations Command sponsored programs to develop
binocular night vision goggles incorporating digitally fused low-light level
and thermal image sensors. Both head-mounted digital imaging systems will allow
low-light level and thermal imagery to be viewed individually or to be overlaid.
Simulation and Training
Near-eye display systems are high-performance, micro-display products for near-eye,
portable viewing of video in military and commercial markets. Intevac’s
eyeglass and helmet-mounted display systems provide high definition and a wide
field-of-view in miniaturized light-weight and portable designs. Intevac’s
I-PortTM helmet-mounted display provides solutions for such diverse markets
as medical, industrial, commercial and military, including training and simulation.
Commercial Products
Low-Light Cameras
Photonics’ MicroVista® product line of commercial compact and lightweight
low-light Complementary Metal–Oxide–Semiconductor (“CMOS”)
cameras provides high sensitivity in the ultraviolet, visible or NIR regions
of the spectrum for use in industrial inspection, bio-medical and scientific
applications. These cameras are primarily sold through distribution channels
and to original equipment manufacturers.
Raman Materials Identification Instruments
Prior to March 2013, Intevac designed, manufactured and marketed Raman spectroscopy
systems to the medical, scientific, pharmaceutical and other industrial markets.
In March 2013, Intevac divested and sold certain assets comprising its Raman
spectroscopy instruments product line, also known as DeltaNu.